发明名称 ULTRA HIGH-TEMPERATURE HEAT-TREATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To reduce repairing costs by replacing the heater of an ultra high- temperature heat-treating device by a new one in single units and to reduce the reaction with a furnace material and the shrinkage of the furnace material, by fixing only a power introduction part, without fixing the heat generation part of the heater directly. SOLUTION: In an electric furnace B for composing an ultra high-temperature heat-treating device A, a heater 1 that can be replaced by a new one in single units is fitted to an inner wall surface 3 of a heat-insulating material 2 in the furnace without adhesion. Also, only a power introduction part is fixed and fitted, without fixing a heat generation part 4 for composing the heater 1 that can be replaced by a new one in single units, without gluing to the inner wall surface 3 of the heat-insulating material 2 in the furnace.
申请公布号 JP2001210649(A) 申请公布日期 2001.08.03
申请号 JP20000013511 申请日期 2000.01.21
申请人 SHINKU GIKEN:KK 发明人 NANBU TOSHIO;SHINOHARA MAKOTO
分类号 H01L21/22;C30B33/00;F27B3/00;F27D11/02;H01L21/00;H01L21/31;H01L21/324;(IPC1-7):H01L21/324 主分类号 H01L21/22
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