| 摘要 |
PROBLEM TO BE SOLVED: To provide an element which always has fixed and superior piezoelectric properties and realizes relatively easy control of a manufacturing process. SOLUTION: In a piezoelectric element, where electrodes 6, 8 are arranged at both sides of a piezoelectric film 7, the surface of the piezoelectric film in contact with an electrode is provided with an oxide layer 7a, which is formed of solid solution of a composite oxide represented by chemical formula of ABO3 or two or more kinds of composite oxides shown by chemical formula of ABO3 each, and whose Pb content is 0 or 15 wt.% or less. |
