| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner which reduces the effect of the vibration of a driving system and reduces instrumental errors of a stage position. SOLUTION: An apparatus separately and independently comprises a first level block 1 mounting an exposure means, a bearing 9 which supports a slide shaft 8 for moving a stage base plate 5 which mounts samples to be exposed, and arranging an interferometer 13 of a laser length-measuring machine 6, which measures the location of the stage base plate 5 on the first level block 1. |
