| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor acceleration sensor which is suppressed in the variation of characteristics caused by the fluctuation of ambient temperature. SOLUTION: This semiconductor acceleration sensor is provided with a projection 23 for fixation which is protruded toward the bottom plate 31 of a shield can 30 on the center part of the bottom face of the bottom wall 22 of a body 20 and an opening 33 for inserting the projection 23 on the bottom plate 31 of the can 30, and the body 20 is fixed to the can 30 by caulking the front end section of the projection 23 protruded from the opening 30 by melting the section with heat. Consequently, the occurrence of a strain caused by the difference between the coefficients of thermal expansion of the body 20 and can 30, both of which are made of different materials, can be reduced, because the contact area between the body 20 and can 30 is reduced and the fluctuation of ambient temperature is hardly transmitted to the body 20. Therefore, the reliability of the acceleration sensor can be improved by suppressing the variation of characteristics.</p> |
