| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pipe connecting structure for a rotary joint preventing contamination such as metal ions and further miniaturized, for example, in a CMP polishing device. SOLUTION: This structure is so constituted that a bolt 49 with a seal cap 43 inserted therethrough is fastened axially relative to a shaft 12 so that a connector 42 is fixed to an opening of a rotation side channel 14 opened in the bottom end of the shaft by the seal cap 43 and the diameter-enlarged part of each tube 41 is axially press-contacted. This constitution prevents a base metal from being exposed by the peel-off of the resin coating, when a male connector is directly and threadedly engaged with the shaft conventionally, so as to prevent the contamination of the metal ion. Even when a plurality of rotation side channels 14 are formed, the interval between the respective rotation side channels 14 can be reduced so that the diameter of the shaft 12 can be reduced, thereby miniaturizing the structure.</p> |
