ELECTRIC FIELD EMISSION TYPE ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an electric field emission type electron source which can obtain larger emission current than prior arts. SOLUTION: A plurality of first wirings 21 are formed in the form of stripe on the surface of an insulation substrate 11 composed of a glass substrate, and non-doped polycrystalline silicon layers 3 are formed on the surface of an insulation substrate 11 to cover all first wirings 21, and strong electric field drift layers 6 composed of oxidized porous polycrystalline silicon are formed in an overlapped area with the first wiring 21 of the polycrystalline silicon layers 3 to be separated from the first wiring 21. Each surface electrode 7 is formed in the form extending to the plurality of the strong electric field drift layers 6 and to the polycrystalline silicon layers 3 interposed between the strong electric field drift layers 6. Each wiring 21 comprises an electric conductive layer 8, and an n-type polycrystalline silicon layer 9, which contacts the electric conductive layer 8 and is a low resistance semiconductor layer formed on the electric conductive layer 8.