发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING IT
摘要 <p>PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device. SOLUTION: This highly reliable semiconductor device is constituted in such a way that metallic films are caused to be deposited on the side face and top face of gate wiring by electroplating in a GOLD structure in which the metallic films are superposed upon an LDD area through a gate insulating film.</p>
申请公布号 JP2001210833(A) 申请公布日期 2001.08.03
申请号 JP20000350612 申请日期 2000.11.17
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 MAEKAWA SHINJI;NAKAZAWA MISAKO
分类号 G02F1/136;G02F1/1368;G09F9/30;H01L21/20;H01L21/3205;H01L21/336;H01L21/8238;H01L23/52;H01L27/08;H01L27/092;H01L27/32;H01L29/423;H01L29/43;H01L29/49;H01L29/786;(IPC1-7):H01L29/786;H01L21/320;H01L21/823 主分类号 G02F1/136
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