摘要 |
PROBLEM TO BE SOLVED: To provide a deformable mirror capable of easily obtaining a desired degree of curvature with a small electric power even when it is manufactured in such minute outside dimensions as usable in so-called micro machines. SOLUTION: The deformable mirror 20 capable of varying the shape of the reflection surface and is equipped with a mirror main body 26 having a light reflection surface 26a to reflect the light, supporting members 22, 24 to support a part of the mirror main body and a driving force transmission means 30 arranged as a projection from the mirror main body and transmitting the driving force to the mirror main body with the input driving force to vary the shape of the reflection surface.
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