| 摘要 |
PROBLEM TO BE SOLVED: To provide a load-canceling mechanism, which can prevent vibrations, which are produced in one of vacuum chambers from propagating to the other vacuum chamber, by removing effectively a compression force applied for bellows, when two vacuum chambers are coupled with bellows. SOLUTION: Two vacuum chambers 3 and 4 have coil spring-shaped flexibility, are joined each other and are connected by a bellows 1 with a hollow inside. Therefore, because the inside of bellows 1 is at a vacuum, an enormous compressive force is applied to the bellows 1. Two air springs 2 are arranged in parallel with bellows 1 and located at equal distance from the bellows 1, of which the Z-orientation locations of both sides are equal, and a force F applied to the bellows 1 is half shared by each, and load is canceled, to eliminate this compressive force. |
