METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a flat panel display having sophisticated functions. SOLUTION: A system having an active matrix type display mounted with a CPU and a memory is manufactured with a thin-film transistor. A crystal silicon film of a thinfilm transistor causes crystallization by means of treating an amorphous silicon, in which the elements for promoting crystallization of an amorphous silicon are introduced by heat at a higher temperature, at a range of 450 deg.C-650 deg.C in an oxidizing atmosphere.