| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of surface acoustic wave device which is capable of adjusting frequency accurately. SOLUTION: The method comprises a first step where an IDT electrode 4 and a connecting electrode 5 are formed on a piezoelectric substrate 3 to provide surface acoustic wave device 6, a second step where the frequency response of the surface acoustic wave device 6 is then measured, a third step where the surface acoustic wave device 6 is then destaticized, and a fourth step where the surface acoustic wave device 6 is subsequently adjusted in accordance with the result of the measurement in the second step, and since the surface acoustic wave device 6 is hardly charged with electricity, above purpose can be achieved.
|
