摘要 |
A differential interference contrast microscope including an illuminating light source 61, a polarizer 62 for converting an illumination light ray into a linearly polarized light, a polarized light separating means 63 for dividing the linearly polarized light ray into two linearly polarized light rays having mutually orthogonal vibrating directions, an illuminating optical system 64, 65 for projecting the two linearly polarized light rays onto an object 66 under inspection, a polarized light combining means 69 for combining the two linearly polarized light rays on a same optical path via an inspecting optical system 67, 68, an analyzer 70 for forming a differential interference contrast image on an imaging plane 71. The polarized light separating means 63 is constructed such that an amount of wavefront shear between the two linearly polarized light rays on the object can be changed, and the polarized light combining means 69 is arranged between the object 66 and the analyzer 70 at such a position that the two linearly polarized light rays propagate in parallel with each other and is constructed such that the two linearly polarized light rays can be combined with each other in accordance with the shear amount of wavefront introduced by the polarized light separating means 63.
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