发明名称 SELF-ALIGNMENT HYBRIDIZATION PROCESS AND COMPONENT
摘要 <p>A method of forming a hybrid optical component includes the steps of masking and etching a pattern on a core layer of a planar optical component to define at least one alignment element and an optical element and subsequently overcladding the optical element such that a passive platform is formed which exposes a surface of the optical element such as a waveguide and an alignment element for receiving a mirror image alignment element formed on an active platform including an active device, such as a laser. Hybrid components include a passive platform having an alignment element formed therein and a waveguide for receiving an active platform with a mating mirror image alignment element and an active device which aligns with the waveguide when the platforms are mated. Such a fabrication method and resulting optical component provide a highly efficient, self-aligning passive and active component platforms which greatly reduce the cost of fabrication of hybrid optical circuits as well as improve their reliability and reduce their cost.</p>
申请公布号 WO2001055791(A1) 申请公布日期 2001.08.02
申请号 US2000033702 申请日期 2000.12.13
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