Measurement signal output device for testing integrated circuit, has electro-optical probe which is connected to input/output unit by cables, and signal measurement unit connected to input/output unit by connector

摘要

An electro-optical probe (15A) outputs light signal to an optical input/output unit (D) with photodiodes (21,22) to convert it into electrical signals. The signals are amplified and output to signal measurement unit (E) which supplies power to input/output unit (D). The probe and input/output unit are coupled by cables (38,39), and signal measurement unit and input/output unit are coupled by a connector (45).