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发明名称
Verfahren und Vorrichtung zu Oberflächenbehandlung
摘要
申请公布号
DE69800975(D1)
申请公布日期
2001.08.02
申请号
DE19986000975
申请日期
1998.01.10
申请人
NISSIN ELECTRIC CO., LTD.
发明人
MIYAKE, KOJI;NAKAHIGASHI, TAKAHIRO;KUWAHARA, HAJIME
分类号
H05H1/46;C23C14/48;C23C16/515;C23F4/00;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C16/50
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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