Semiconductor device having conducting material film formed in trench, manufacturing method thereof and method of forming resist pattern used therein

摘要

A highly reliable semiconductor device having an underlying film with a trench and a conducting material film formed in the trench, a method of manufacturing the same and a method of forming a resist pattern used therein are obtained The underlying film having an upper surface and the trench is formed. The conducting material film is formed on the upper surface and in the trench. A photo resist film is formed on the conducting material film located on the upper surface of the underlying film and in the trench. The photo resist film is left in the trench whereas the photo resist film is developed and removed outside the trench. The conducting material film located on the upper surface of the underlying film is etched and removed with the photo resist film left in the trench used as a mask.