发明名称 Field-effect transistor and manufacture thereof
摘要 A source and a drain of a field-effect transistor are formed so as to fulfill a specified physical relationship to upper and lower gates thereof and thereby parasitic capacitance that hampers its high-speed operation is minimized. The filed-effect transistor includes a second support substrate, a lower gate that is embedded in an insulator formed on the second support substrate, an insulating layer formed on the lower gate, a semiconductor layer formed on the insulating layer, an insulating layer formed on the semiconductor layer, an upper gate formed on the insulating layer, as well as a source electrode, a drain electrode, an upper gate electrode, and a lower gate electrode all of which are isolated from one another by the insulating layer.
申请公布号 US2001010380(A1) 申请公布日期 2001.08.02
申请号 US20000750441 申请日期 2000.12.28
申请人 SECRETARY OF AGENCY OF INDUSTRIAL SCIENCE AND TECH 发明人 MAEDA TATSURO
分类号 H01L21/336;H01L29/786;(IPC1-7):H01L29/786;H01L21/76 主分类号 H01L21/336
代理机构 代理人
主权项
地址