Method for observing cross-sectional structure of sample

摘要

The object of the present invention is to provide technology for processing and observing a cross-section using a focussed ion beam method for obtaining a microscopic image where an original sample surface shape is clearly depicted at the sample surface in a cross-section processing step. The present invention achieves this object by first forming a covering layer of a different material to the material of a sample surface at the surface of the as-yet unprocessed sample. A protective layer is then formed by deposition and this portion is subjected to cross-section processing. A covering layer of a different material then exists at the boundary of the original sample surface and the protective layer deposited by deposition. The presence of the covering layer of a different substance in a microscopic image then enables the shape of the original sample surface to be clearly depicted.