| 摘要 |
A regenerative blower (128) pulls ambient air (101) into a flow (138) within a particle sensor (106) and a laser (134) illuminates the flow to generate radiation (140) indicative of particles within the flow. A detector (142) detects the radiation; and particle sensing electronics (144) senses particles within the flow at a preselected volumetric flow rate, e.g., 1CFM. A plurality of pressure sensors (120, 122, 124) and a blower voltage controller (126) responsive to the sensors adjusts the speed of the blower to achieve the preselected volumetric flow rate. A high efficiency exhaust filter (152) filters air from the blower. An airflow path (148) between the particle sensor and the blower has at least one bend between the particle sensor and the blower to increase compactness of the system. An aerosol manifold (104) is connected for fluid communication with an inlet (102) of the particle sensor such that the blower draws air from the manifold at the preselected volumetric flow rate. The manifold samples ambient atmospheric air at a second CFM rate, e.g., 3CFM, that is greater than the preselected volumetric flow rate. A turbomolecular pump (300) can replace the regenerative blower for high pressure differential particle sensing environments. |
