Verfahren und Vorrichtung zur Messung insbesondere von Oberflächentopologien in mikroskopischer Auflösung

摘要

The start of the displacement movement is initiated by a software instruction (2, 3) when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor (1) are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller (4).