Method for making diaphragm-based sensors and apparatus constructed therewith
摘要
申请公布号
EP1098181(A3)
申请公布日期
2001.08.01
申请号
EP20010200463
申请日期
1992.02.06
申请人
HONEYWELL INC.
发明人
MIRZA, AMIR R.;STRATTON, THOMAS G.;SAATHOFF, DIEDRICH J.;CARNEY, JAMES K.;HOCKER, BENJAMIN G.;BURNS, DAVID W.;AKINWANDE, AKINTUNDE I.;HORNING, ROBERT D.