PREVENTATIVE MAINTENANCE INTER-LOCK METHOD

摘要

PURPOSE: A preventative maintenance inter-lock method is provided to notify a user of necessity for a preventative maintenance and prevent any accident by performing an inter-lock if there exists an error possibility in equipments. CONSTITUTION: When there is a request for a track-in, it is provided a current wafer process number information from process equipment. The wafer process number information is compared with preventative maintenance data. If the wafer process number does not reach a number of wafers necessary for the preventative maintenance, the track-in request is processed. When the wafer process number reaches the number of wafers necessary for the preventative maintenance, an inter-lock is performed on the process equipments to hold any process. When the wafer process number reaches a number of wafers necessary for displaying a warning message, the warning message is displayed through a user's interface connected to a host. When the wafer process number reaches a number of wafers necessary for displaying an alarm message, the alarm message is displayed through the user's interface.