发明名称 Methods of forming semiconductor wafers, methods of treating semiconductor wafers to alleviate slip generation, ingots of semiconductive material, and wafers of semiconductive material
摘要 The invention encompasses methods of treating semiconductive material wafers and ingots to alleviate slippage within monocrystalline lattices of the wafers and ingots. The invention further encompasses monocrystalline semiconductive material wafers and monocrystalline semiconductive ingots which are treated to alleviate slippage within a crystalline lattice of the wafers and ingots. In one aspect, the invention includes a method of forming a semiconductive material wafer comprising: a) forming an ingot of semiconductive material, said ingot comprising an outer periphery; b) forming a wafer from the ingot, the wafer comprising said outer periphery; and c) doping said outer periphery with strength-enhancing dopant atoms. In another aspect, the invention includes a method of forming a semiconductive material wafer comprising: a) forming an ingot of semiconductive material, said ingot comprising an outer periphery; b) implanting a stacking fault inducing material into the ingot to form stacking faults proximate the outer periphery of the ingot; and c) forming a wafer from the ingot, the wafer comprising the stacking faults. In another aspect, the invention includes an ingot of semiconductive material comprising: a) an outer periphery region which comprises an outer boundary of the ingot; and b) strength-enhancing dopant atoms provided within the outer periphery region.
申请公布号 US6267817(B1) 申请公布日期 2001.07.31
申请号 US20000548036 申请日期 2000.04.12
申请人 MICRON TECHNOLOGY, INC. 发明人 GONZALEZ FERNANDO
分类号 C30B33/00;H01L21/265;(IPC1-7):C30B25/18 主分类号 C30B33/00
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