Vertical channel field effect transistor

摘要

A vertical channel field effect transistor and a process of manufacturing the same. The vertical channel field effect transistor is disposed on a surface of a substrate and comprises an epitaxial silicon stack having a bottom terminal comprising heavily doped silicon, a channel comprising lightly doped silicon of opposite doping type from the bottom terminal, and a top terminal comprising heavily doped silicon of the same doping type as the bottom terminal. The vertical channel field effect transistor also comprises a gate dielectric layer covering at least a portion of the bottom terminal, the channel, and the top terminal, and a gate in contact with the gate dielectric layer. The gate is positioned adjacent the channel and adjacent at least a portion of the bottom terminal and top terminal. The channel has a thickness between the bottom terminal and the top terminal from about 50 angstroms to about 800 angstroms.