GAS FLOW CONTROL IN A SUBSTRATE PROCESSING SYSTEM,申请号KR1020017000560-传众专利搜索

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发明名称	GAS FLOW CONTROL IN A SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号	KR20010071892(A)	申请公布日期	2001.07.31
申请号	KR1020017000560	申请日期	2001.01.13
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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