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发明名称
DEVICE AND METHOD FOR PLASMA PROCESSING
摘要
申请公布号
KR20010072635(A)
申请公布日期
2001.07.31
申请号
KR1020007014610
申请日期
2000.12.22
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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