| 摘要 |
PROBLEM TO BE SOLVED: To provide ceramics hardly generating particles and high in corrosion resistance. SOLUTION: This ceramics consists of a sintered compact that contains as metal components silicon and at least one of group IIIa elements of the periodic table and has 98% or higher relative density. In the sintered compact, the silicon and group IIIa elements exist mainly as composite oxides of them in the main crystal phase, the maximum content of each of the metal elements other than the silicon and group IIIa elements is 500 ppm or lower, the total content of the metal elements other than the silicon and group IIIa elements is 1,000 ppm or lower and the content of silicon oxide particle is 10 volume% or lower. |
