发明名称 Cushioned wafer container
摘要 A wafer container comprising a receptacle and door provides for horizontal minimal contact support of wafers and provides for vertical support without one surface support intermediate the front edge support and rear edge support. The wafer carrier has for each wafer two distinct levels of support axially offset from one another. The first level of support is by wafer shelves contacting the bottom surface at the left side and right side of each wafer. The second level of support is provided by cushions securing the wafer at the front edge and back edge without one surface support at the left and right edges. The cushions on the door and at the rear of the receptacle are preferably removable such as by folding or compressing the cushion unit. The cushions preferably have V-shaped wafer engaging elements to constrain the wafer edge and to provide a lower ramp surface to guide and lift the front and rear edges of the wafer upwardly from the first level to the second level of support when the door is placed in position in the open front of the container portion.
申请公布号 US6267245(B1) 申请公布日期 2001.07.31
申请号 US19990349314 申请日期 1999.07.08
申请人 FLUOROWARE, INC. 发明人 BORES GREGORY W.;ZABKA MICHAEL C.
分类号 B65D57/00;B65D85/00;B65D85/86;H01L21/673;(IPC1-7):B65D85/90 主分类号 B65D57/00
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