SYSTEM AND METHOD FOR REDUCING PARTICLES IN EPITAXIAL REACTORS,申请号KR1020017000387-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR REDUCING PARTICLES IN EPITAXIAL REACTORS
摘要
申请公布号	KR20010071820(A)	申请公布日期	2001.07.31
申请号	KR1020017000387	申请日期	2001.01.09
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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