| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum coating system capable of forming in such a manner that, for attaining the optimum and uniform deposition on each optical substrate, the substrate face always lies in a precise prescribed position sop that the substrate face moves toward the distributing characteristics of a coating material denuded from a target. SOLUTION: In this vacuum coating system for applying coating on the face of an optical substrate 10 such as an eyeglass lens capable of fixing on carrying equipment 3, 3' having at least one, particularly magnetron-sputtering target and a coating feeding source 4 and rotatably provided in a vacuum tank 1 capable of forming an airtightly sealable vacuum condition and also capable of forming an atmosphere composed of inert gas, a fixing means 10' for respectively one substrate 10 is provided on the carrying equipment 3, 3' on respectively one rotary axis 5 and also is rotatively connected with the carrying equipment via a transmission gear 6. |
