发明名称 |
Isolation technique for pressure sensing structure |
摘要 |
An electronic pressure-sensing device is isolated from corrosive, conductive gasses and fluids by a corrosion resistant metal diaphragm welded to a pressure port. The pressure-sensing device is attached to a support structure with a hole that provides a path from the diaphragm area to the pressure-sensing device. A fill fluid is sealed behind the diaphragm and fills the hole through the support structure to the electronic pressure-sensing device. In this design, any hostile chemical applied is completely isolated from the electronic sensor and associated adhesive seals by the metal diaphragm. |
申请公布号 |
AU3289001(A) |
申请公布日期 |
2001.07.31 |
申请号 |
AU20010032890 |
申请日期 |
2001.01.19 |
申请人 |
SILICON VALLEY SENSORS, INC. |
发明人 |
DAVID E. WAGNER;GERALD LOPOPOLO;JAMES H. HOFFMAN |
分类号 |
G01L7/08;G01L9/00 |
主分类号 |
G01L7/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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