DEVICE FOR ELECTROLYZING SINGLE PLATE-SHAPED APERTURE MASK MATERIAL AND ELECTROLYTIC METHOD

摘要

PROBLEM TO BE SOLVED: To provide the electrolytic device and electrolytic method by which even a single plate-shaped aperture mask is excellently cleaned by electrolysis with less man-hour for working. SOLUTION: The single plate-shaped aperture mask material W is dipped in an electrolyte L by a roller conveying mechanism 120 and a chain conveying mechanism 13 with both sides held between the mechanisms, continuously conveyed, applied with a voltage from a voltage applying mechanism 140 and electrolyzed. Besides, the roller conveying mechanism 120 includes rollers 121 rotating around rotary shafts 121a perpendicular to the conveying direction F and parallel to the surface of the mask material W, and the chain conveying mechanism 130 includes a chain 131 moved in the conveying direction F along the surface of the mask material W.