| 发明名称 |
Metal wire fuse structure with cavity |
| 摘要 |
An integrated circuit has primary devices and redundant devices being selective substituted for the primary devices through at least one fuse. The fuse includes a first layer having at least one fuse link region, a second layer over the first layer and cavities in the second layer above the fuse link region.
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| 申请公布号 |
US6268638(B1) |
申请公布日期 |
2001.07.31 |
| 申请号 |
US19990258563 |
申请日期 |
1999.02.26 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRINTZINGER AXEL C.;KIEWRA EDWARD W.;NARAYAN CHANDRASEKHAR;RADENS CARL J. |
| 分类号 |
H01L21/82;G11C29/04;H01H85/00;H01L21/8242;H01L23/525;H01L27/02;H01L27/108;(IPC1-7):H01L27/02 |
主分类号 |
H01L21/82 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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