| 摘要 |
A method of forming a groove having a desired cross section easily and rapidly, by making laser beam scan in the longitudinal direction of the groove. In the method, a laser beam 11 is irradiated to a work 15 to form a groove 16. When the longitudinal and the width direction of the groove is the x-axis and the y-axis, respectively, an intensity distribution of the laser beam in an irradiated region Q on the work is expressed by f(x, y). An integral of f(x, y) with respect to x, i.e., g(y), is proportional to a depth distribution of the groove 16, d(y), and the intensity distribution f(x, y) is formed by passing the laser beam 11 through a mask pattern 12a which has an appropriate transmission factor distribution. The groove 16 is formed by moving the region Q in the x-axis direction. The cross section of the groove 16 is determined by the mask pattern 12a. And the groove 16, having a desired cross section, is obtained in one scanning in the x-axis direction.
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