| 摘要 |
PROBLEM TO BE SOLVED: To precisely position a receiving and delivery position of an object to be carried even in the case when distortion is caused on a chamber due to backing. SOLUTION: Carrying devices 2, 3 can be connected to each other on their end part, fixing points are provided on the carrying devices 2, 3 and bellows 4 are provided on end parts of the carrying devices 2, 3 in a vacuum carrier system to carry samples through the carrying devices 2, 3 to which processors 7a, 7b, 7c to apply specified processes on the samples can be connected.
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