| 摘要 |
An oscillator 20 and main frames 30-1 and 30-2, coupled to one another by beams 33-1 through 33-4, float above the upper face of a substrate 10. The main frames 30-1 and 30-2 are divided into a plurality of sections along a Y-axis. Drive electrode portions 51-1 through 51-4 drive the main frames 30-1 and 30-2 and the oscillator 20 in the direction of an X-axis. Due to an angular rate around a Z-axis perpendicular to the X and Y axes, the oscillator 20 oscillates in the direction of the Y-axis. The oscillation in the direction of the Y-axis is measured using a high-frequency signal applied to detection electrode portions 53-1 through 53-4, whereby the angular rate is detected. The main frame 30-1 is provided with drive electrode portions 51-1 and 51-2, while the main frame 30-2 is provided with drive electrode portions 51-3 and 51-4. Drive signals independent from one another are supplied to the drive electrode portions 51-1 through 51-4, whereby the main frames 30-1 and 30-2 are caused to oscillate precisely in the direction of the X-axis.
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