ROTARY CUP TYPE LIQUID CHEMICAL APPLYING DEVICE

摘要

PROBLEM TO BE SOLVED: To apply liquid chemicals in a wide range with high precision by eliminating the phenomenon of breaking the in-plane uniformity of the liquid chemical with the property of the liquid chemical in a rotary cup type liquid chemical coating device. SOLUTION: The coating device is provided with a 1st hood 3 forming a sub-sealed space inside by the connection to a rotary cup 20, a 2nd hood 300 for changing the sub-sealed state of the rotary cup 20 by the connection to the 1st hood 3, a hanging structure to elevate the hoods simultaneously and a hanging structure to elevate only the 2nd hood 300 and the air flow on the surface of a substrate to be treated in the coating is controlled by making the state of the rotary cup 300 changeable and changing the state of the hood in accordance with the kind of the liquid chemical.