| 摘要 |
1,148,007. Zone-melting. SIEMENS-SCHUCKERTWERKE A.G. 7 July, 1966 [10 July, 1965; 26 April, 1966], No. 30649/66. Heading B1S. In the zone-melting of a rod 2 of silicon using a seed crystal and induction heating, the recrystallized rod is after-heated by radiation from a surrounding cylinder 5 which is heated to 1,500‹C by resistance or induction heating. The cylinder is of tungsten, molybdenum, or graphite coated with pyrolytic hard carbon. The cylinder has an internal diameter at least as large as that of the rod and is as long as the molten zone. Melting is effected by a pancake induction coil 4 having a diameter which i's larger (Fig. 1) or smaller (Fig. 4) than that of the rod (in the latter case, the molten zone being a narrow neck). The rod may be preheated before zone-melting by a cylindrical induction coil 6. |
