发明名称 Method for forming fine-pitched solder bumps
摘要 A method for forming solder balls that have larger spacings between them and electronic devices containing such solder balls are disclosed. In the method, an additional layer of a leachable metal such as gold or silver is used between an under bump metallurgy layer and a solder bump subsequently formed. This allows the formation of the under bump metallurgy layer prior to the deposition of the solder material into a window formed in a photoresist layer. The present invention allows the underfill of a solder window, instead of an overfill which is normally required in a conventional method.
申请公布号 US6268114(B1) 申请公布日期 2001.07.31
申请号 US19980156353 申请日期 1998.09.18
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD 发明人 WEN YING-NAN;KUNG LING-CHEN;LU SZU-WEI;UANG RUOH-HUEY
分类号 H01L21/60;(IPC1-7):G03C5/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址