| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion resistant member and a chamber-constituting member which little evaporates and generates only a small amount of particles in halogenated gases and the plasma thereof and also high is heat radiation. SOLUTION: A structural body obtained by forming a coating layer composed of the fluoride of at least one metal selected from the group consisting of alkaline-earth metals, rare earth metals, aluminum and iron-group metals on the surface of a substrate composed of metal essentially consisting of copper is used as a corrosion resistant member such as a chamber-constituting member. |
