| 摘要 |
A light valve which can be fabricated as an array of individually addressable micromachined linear mirror reflective light valves is disclosed. Each light valve may comprise a metallized silicon nitride ribbon situated above a micromachined cavity. Incident light is reflected by the ribbons. The reflected beam travels into an optical collecting system. The ribbons may be caused to deform into the micromachined cavities by the application of electrical signals. Only a small area on the ribbons is required to be reflective. The deformation causes light reflected by the deformed ribbon to be substantially collimated. The collimated reflected light can be directed through a slit and focussed on a spot to record a data element on a recording surface. A light valve array according to the invention may be used for various data recording applications including exposing printing plates, printed circuit boards, silicon wafers, masks for making semiconductor devices, optical data storage systems and the like.
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