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发明名称
摘要
申请公布号
JP3194547(B2)
申请公布日期
2001.07.30
申请号
JP19920350208
申请日期
1992.12.04
申请人
发明人
分类号
C30B25/14;H01L21/205;H01L21/84;H01L27/12;(IPC1-7):H01L21/205
主分类号
C30B25/14
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