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发明名称
摘要
申请公布号
JP3192672(B2)
申请公布日期
2001.07.30
申请号
JP19910058681
申请日期
1991.03.22
申请人
发明人
分类号
C01B13/14;C01G1/00;C01G3/00;C23C14/28;C30B29/22;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):C30B29/22
主分类号
C01B13/14
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代理人
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