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发明名称
METHOD AND APPARATUS FOR TREATING A SEMI-CONDUCTOR SUBSTRATE
摘要
申请公布号
KR20010071253(A)
申请公布日期
2001.07.28
申请号
KR1020007012713
申请日期
2000.11.14
申请人
发明人
分类号
H01L21/3105
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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