| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic disk which is capable of easily manufacturing protective films having excellent durability and corrosion resistance with extremely thin films and improving the yield in manufacturing and a sputtering device used for the same. SOLUTION: After a magnetic film or the like is formed on the surface of a substrate 15, the substrate is arranged to exist at the center of a pair of electrodes 13 arranged to face each other within a device body 11 of the sputtering device. A power source 17 is connected to both electrodes 13 and an AC power source is used for this power source 17, by which both electrodes 13 are alternately changed to anode and cathode at a prescribed frequency in such a manner that, if the one electrode 13 is the anode, the other electrode 13 is the cathode, and if the one electrode 13 is the cathode, the other electrode 13 is the anode. Targets 14 mounted at the surfaces of the electrodes 13 are sputtered, by which the protective films are formed.
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