| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film magnetic head which is formed with an SiO2 film, etc., particularly having good adhesion and a method for manufacturing the thin-film magnetic head using nickel(Ni) films for electrode terminals etc. SOLUTION: The method for manufacturing the thin-film magnetic head formed by applying lithography and various kinds of deposition techniques and successively laminating lower cores 4, insulating layers 2 and 5, coils 7, insulating layers 10 and upper cores 12 on a nonmagnetic substrate 1 is constituted to form the nickel(Ni) layers 14A on the surfaces of lead parts 14 connected to the coils 7 after the formation of these lead parts, to form oxidized layers 14B by exposing the formed nickel layers to oxygen(O2) plasma or ozone(O3) and to form protective films 18 on the formed oxidized layers.
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