| 摘要 |
PROBLEM TO BE SOLVED: To eliminate interference fringe noise from interference fringe analysis data in an interferometer device taking a wavelength variable light source as an observing light source by setting the optical distance between a designated optical surface and a reference surface (surface to be measured) to a value designated number of times as large as the optical distance between the reference surface and the surface to be measured, and performing fringe scan by an integral bucket method. SOLUTION: The wavelength variable light source is taken as the observing light source, the optical distance L1 between the surface of a collimator lens and the reference surface or the surface to be measured is set to a value designated number of times as large as the optical distance L2, the wavelengthλof output light is continuously varied with every different range substantially byλ2/mL1 (m is the number of input images), an interference fringe image is continuously imaged by an image pickup means, and the obtained plural interference fringe image information is processed by the integral bucket method to make interference fringe analysis.
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