SEMICONDUCTOR ACCELERATION SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor and its manufacturing method capable of preventing malformation caused by positioning error of etching of a semiconductor substrate without inducing sensitivity decline of the semiconductor acceleration sensor. SOLUTION: In this semiconductor acceleration sensor, an overlapping part 12 and a thin-walled part are formed by first etching from one main surface side of the semiconductor substrate 1, and an aperture 8 for separating the overlapping part 12 from a support part 11 is formed by second etching from the other main surface side of the semiconductor substrate 1 in accordance with the forming position of the thin-walled part. The sensor is characterized by forming the opening width 8b of the second etching larger than the opening width 8a of the first etching.