| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a semiconductor galvano-device equipped with a light emitting element and light receiving element. SOLUTION: In the semiconductor galvano-device in which a frame part body, a torsion swinging body disposed within the frame part body, and a torsion beam for holding the torsion swinging body are formed on the same semiconductor substrate and which has a light emitting element and a light receiving element on the same semiconductor substrate, the light emitting element and light receiving element are mounted on the torsion swinging body.
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