| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system for improving the measurement accuracy of a gas concentration sensor 1, such as the capacitive humidity sensor 1 or the like. SOLUTION: This method includes a process of measuring a parameter of the sensor 1 such as resistance, capacitance or the like which keenly reacts to a gas being measured or its concentration and a process of concurrently changing the temperature of the sensor (1) in a cyclic form. The parameter of the sensor (1) being measured is at least substantially continuously measured at least N times during each heating cycle. The measured parameter value is filtered to obtain a signal component which is to be used for the later process and is coupled with the fundamental frequency of the heating cycle. The thus- filtered signal component is used to correct and/or calibrate actual output signals of the sensor.
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